ALD/CVD Precursors

More than 800+ high purity compounds, including:

• Acetates
• Acetylacetonates
• Alkenes/Dienes
• Carbonyls
• Cyclopentadiene derivatives
• Metal-alkyl and -hydride bonds
• Noble metals
• Pyrophorics

Commonly used precursors available includes:

• Trimethylaluminum (TMA)
• Tris(dimethylamino)antimony(III)
• Bis(diethylamino)silane (BDEAS)
• Diethylzinc (DEZ)
• Tetrakis(dimethylamino)zirconium (TDMAZ)
• Tetrakis(dimethylamino)hafnium (TDMAH)
• (t-Butylimido)tris(diethylamino) niobium(V) (TBTDEN)
• Tris(dimethylamino)silane (3DMAS)
• Tetrakis(Dimethylamino)Titanium(IV) (TDMAT)
• Trimethylindium
• Tetrakis(Dimethyamino)Tin(IV)
• Copper Acetylacetone